MEMS Capacitive Microphone with Dual-Anchored Membrane
نویسندگان
چکیده
منابع مشابه
MEMS Capacitive Microphone with Dual - Anchored Membrane †
In this paper, we proposed a MEMS capacitive microphone with a dual-anchored membrane. The proposed dual anchor could minimize the deviation of operating characteristics of the membrane according to the fabrication process variation. The membrane is connected and fixed to the back plate insulating silicon nitride structures instead to the sacrificial bottom insulating oxide layer so that its ef...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040342